Our instruments are suitable for measuring deionised water, cleaning chemicals, solvents, acids, surfactants and abrasive media, such as those used in chemical-mechanical planarisation (CMP). The versatility of the sensor technology enables a consistent measurement approach across various process steps.
Clamp-on Flow Measurement for High-Purity and Corrosive Media
In semiconductor and microchip manufacturing, the precise control of fluid flows is a key factor in process stability, yield and quality. At the same time, the fluids used are either ultra-pure or highly corrosive, which places particular demands on the measurement technology.
Benefits of Using Katronic Ultrasonic Flowmeters in the Semiconductor Industry
Katronics clamp-on flowmeters enable safe, non-invasive measurement, even with media that have low conductivity or pose a high risk. The non-contact measuring principle reliably prevents contamination of high-purity media, whilst at the same time making the handling of aggressive chemicals safer. Furthermore, the systems can be integrated into existing process pipelines without the need for intervention, thereby avoiding downtime and supporting stable production processes.
Reliable Measurement of a Wide Variety of Process Media
Maximum Safety for Staff and Equipment
Invasive measurement systems pose a significant risk when dealing with highly concentrated acids or toxic media. Katronic’s clamp-on technology keeps the medium completely contained, as the sensors are clamped onto the outside of the pipe. This minimises the risk of leaks, prevents staff from coming into contact with hazardous substances and ensures the long-term integrity of the plant.
Reducing Chemical Consumption and Waste
Continuous monitoring of rinsing and cleaning processes enables the precise control of chemical dosages. This extends the service life of baths, reduces waste and lowers the overall consumption of process media. In addition, excess rinse volumes can be detected, thereby reducing the load on the waste water system in a targeted manner.
Trust-Based Partnerships in Semiconductor Manufacturing
Numerous companies in the semiconductor manufacturing sector rely on our solutions – from innovative projects to tried-and-tested collaboration in practice.
Our Customers in the Semiconductor Industry
- Intel
- STMicroelectronics
- Seagate