Our instruments are suitable for measuring deionized water, cleaning chemicals, solvents, acids, surfactants, and abrasive media, such as those used in chemical-mechanical planarization (CMP). The versatility of the sensor technology enables a consistent measurement approach across various process steps.
Clamp-on flow measurement for high-purity and corrosive media
In semiconductor and microchip manufacturing, precise control of fluid flows is a key factor in process stability, yield, and quality. At the same time, the fluids used are either ultra-pure or highly corrosive, which places special demands on measurement technology.
The Benefits of Katronic Ultrasonic Flow Meters in the Semiconductor Industry
Katronics clamp-on flow meters enable safe, non-invasive measurement, even with media that have low conductivity or pose a high risk. The non-contact measurement principle reliably prevents contamination of high-purity media while also making the handling of aggressive chemicals safer. In addition, the systems can be integrated into existing process lines without any modifications, thereby avoiding downtime and supporting stable manufacturing processes.
Reliable measurement of a wide variety of process media
Maximum Safety for Personnel and Equipment
Invasive measurement systems pose a significant risk when dealing with highly concentrated acids or toxic media. Katronic’s clamp-on technology keeps the medium completely contained, as the sensors are clamped to the outside of the pipe. This minimizes the risk of leaks, prevents personnel from coming into contact with hazardous substances, and ensures long-term plant integrity.
Reducing Chemical Use and Waste
Continuous monitoring of rinsing and cleaning processes allows for precise control of chemical dosages. This extends the service life of baths, reduces scrap, and lowers the overall consumption of process media. In addition, excess rinse volumes can be detected, and the wastewater system can be specifically relieved of this load.
Trust-Based Partnerships in Semiconductor Manufacturing
Numerous companies in the semiconductor manufacturing industry rely on our solutions—from innovative projects to proven collaboration in practice.
Unsere Kunden in der Halbleiterherstellung
- Intel
- STMicroelectronics
- Seagate